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Interesting review of previous work on Extreme Ultra-Violet (EUV) light sources. The options for 13nm are Tin, Lithium, and Xenon. ASML uses tin. Earlier work on tin had a roller rotating in a bath of molten tin, so that there was always tin on the roller for the LASER to vaporize. Hitting tin droplets in flight came later. There has been a little work on Xenon. Nobody tries Lithium.